Title page for ETD etd-08292011-141729

Type of Document Master's Thesis
Author Balasubramanian, Karthik
URN etd-08292011-141729
Title Foldable Substrates for Micro-Ultrasonic Transducers
Degree Master of Science in Electrical Engineering (M.S.E.E.)
Department Electrical & Computer Engineering
Advisory Committee
Advisor Name Title
Hah, Dooyoung Committee Chair
Daniels-Race, Theda Committee Member
Feldman, Martin Committee Member
  • Transducer
  • Ultrasound
  • Foldable Substrates
Date of Defense 2011-08-04
Availability unrestricted
Ultrasound has broad range of applications from underwater examination, nondestructive testing of materials and medical diagnosis and treatment. The ultrasonic transducer plays an vital role in determining the resolution, sensitivity, as well as other diagnostic capabilities of an ultrasonic imaging system. Current piezoelectric transducer which dominates the medical field has limited applications compared to the capacitive ultrasonic transducer. The capacitive transducer is easy to fabricate compared to the piezoelectric transducer.

In this work, the fabrication of a foldable substrate for a capacitive ultrasonic transducer has been discussed. The foldable substrate was fabricated using an ultrathin silicon wafer which is 50 Ám thick by using the principle of polymer shrinkage. It is believed that the foldable substrate can be used in intravascular ultrasound (IVUS) and endoscopic ultrasound (EUS) applications for next generation biomedical imaging.

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