Type of Document	Master's Thesis
Author	Yang, Ren
Author's Email Address	ryang1@lsu.edu, ren_yang@yahoo.com
URN	etd-0408102-211030
Title	Development of a Micro Power Relay with Static Electrical Actuator
Degree	Master of Science in Engineering Science (M.S.E.S.)
Department	Mechianical Engineering
Advisory Committee	Advisor Name Title Wanjun Wang Committee Chair Elizabeth J. Podlaha Committee Member Su-Seng Pang Committee Member
Keywords	ANSYS microrelay UV-LIGA MEMS electroplating SU-8
Date of Defense	2002-03-15
Availability	unrestricted
Abstract In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some design and simulation about a new prototype micro power relay are done. Based on the design, UV-LIGA is used as the fabrication method. The bottom part and top part of the micro power relay are fabricated separately. After assembly the top part on the bottom part, some simple tests about the micro power relay are done. The test results are close to the simulation results.
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