Type of Document Dissertation Author Jeong, Seok Jae Author's Email Address email@example.com URN etd-01182006-203351 Title UV-LIGA Micro-Fabrication of Inertia Type Electrostatic Transducers and Their Application Degree Doctor of Philosophy (Ph.D.) Department Mechanical Engineering Advisory Committee
Advisor Name Title Wanjun Wang Committee Chair Elizabeth J. Podlaha Committee Member Marcio S. de Queiroz Committee Member Yitshak M. Ram Committee Member James M. Matthews Dean's Representative Keywords
- functional material
- inertia sensor
Date of Defense 2005-08-31 Availability unrestricted AbstractThis dissertation discusses the design, working principles, static & dynamic analysis and simulation, mechanics of material, applied MEMS technology, micro-fabrication, and experimental testing of two types of micro-transducers: micro-power relay and micro-accelerometer.
Several possible design concepts were proposed, and the advantages and disadvantages of electrostatic working principles were also discussed. Transducers presented in this research used electrostatic force as a driving force in the micro-relay and capacitance as a sensing parameter in the micro-accelerometer. There was an analogy between the micro-relay and the micro-accelerometer in their theoretical approach and fabrication processes.
The proposed micro-transducers (micro-relay and micro-accelerometer) were fabricated using UV lithograph of SU-8 & SPR and UV-LIGA process. The advantages and disadvantages of these processes were discussed. The micro-relays fabricated by UV-LIGA technology had the following advantages compared with other reported relays: fast switching speed, high power capacity, high off-resistance, lower on-resistance, low power consumption, and low heat generation.
The polymer-based micro-accelerometers were designed and fabricated. Instead of applying SU-8 only as a photo resist, cured SU-8 was used as the primary structural material in fabricating the micro-accelerometers. The great flexibility in size and aspect ratio of cured SU-8 made it feasible to produce highly sensitive accelerometers.
The prototype micro-relays and micro-accelerometers were tested for the dynamic characteristics and power capacity. The experimental results in micro-relays had confirmed that reasonably large current capacity and fast response speed was able to be achieved using electromagnetic actuation and the multilayer UV-LIGA fabrication process.
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